G3 Series
Spin Coating Equipment
Spin Coating Equipment
SCS
G3 Series
Spin Coating System
for Reliability and Efficiency in Coating Applications
Overview
Compact yet packed with performance features!
The SCS G3 Spin Coater series sets the standard in operating precision and programming flexibility. It is engineered to provide a high level of rotation accuracy and repeatability, along with precise acceleration and deceleration control. The result is a spin coating solution that combines options to meet specific lab requirements with a level of performance that delivers confidence with every coating application. The SCS G3 is ideal for the uniform application of photoresists, polyimides, metal-organics, dopants, silica films and most organic and aqueous solutions to planar substrates.
Features & Benefits
- Compact enclosure size
- Available with 8-, 12- and 15-inch bowls
- Programmable and non-programmable models
- Fast, simple programming by means of microprocessor-based control
- Front flat panel LCD display and keypad
- Close loop servomotor for precise speed regulation
- Communication port for external control using optional PC interface software for programming, profile storage, PID, diagnostics, vacuum on/off, slow speed centering, and programmable home position
- Precise repeatability from cycle to cycle
- Chemically resistant Teflon coated bowl with integral drain
- Programmable models can store and execute up to 30 programs, with up to 20 steps each (unlimited w/ optional software)
- Encoder allows vacuum chuck to be stopped at home position on programmable models
- Safety glass window on programmable models
- Hinged, interlocking cover on all models
Technical Specifications
| Program Storage | Nonprogrammable Model: Single step profile Programmable Model: 30 programs, 20 steps each |
|---|---|
| Bowl Size | Nonprogrammable Model: 8 in / 20.3 cm Programmable Model: 8, 12 and 15 in / 20.3, 30.5 and 38.1 cm |
| Rotational Speed | Range: 0 to 9999 RPM in 1 RPM increments Tolerance: ±1 to 3 RPM full scale 4000 RPM maximum for the 15-inch bowl unit. |
| Acceleration/Deceleration Time | Range: 0.1 to 25.5 seconds in 0.1 second increments Tolerance: ±0.05 seconds Size and weight of substrate will affect acceleration values. |
| Dwell Time | Range: 0 to 999 seconds in 1 second increments Tolerance: ±0.05 seconds |
| Dispense Time (optional) | Range: 0 to 25.5 seconds in 0.1 second increments Tolerance: ±0.05 seconds |
| Acceleration/Deceleration Linearity | Tolerance: ±%0.1 |
| Power Input | 115/230 VAC, 50/60 Hz, 1Ø |
| Vacuum Input | Minimum 17 in Hg / 430 mm Hg O.D. Fitting: 0.25 in / 0.635 cm |
| Purge Input | 0.55 CFM at 5 psi / 14.15 CLM at 0.35 kg/cm2 Dry air or nitrogen |
| Dimensions (W x D x H) | Nonprogrammable Model, 8 in: 12 x 15.5 x 10.5 in / 30.5 x 39.4 x 26.7 cm Programmable Model, 8 in: 12 x 16.5 x 11.7 in / 30.5 x 41.9 x 29.7 cm Programmable Model, 12 in: 16 x 20.75 x 11.7 in / 40.6 x 52.7 x 29.7 cm Programmable Model, 15 in: 19 x 23.3 x 11.7 in / 48.3 x 59.2 x 29.7 cm |
| Optional Accessories |
External vacuum pump
PC software for external programming and unlimited recipe storage (*)
Foot pedal (*)
Fume exhaust adapter (*)
Manual dispense system (*)
Automated dispense system (SCS Multi-Dispense) (*)
Only for programmable model
|
All or some of the specifications and features noted on this page may be optional. All necessary details in this regard may not be specified on this page. Please contact us for full details. / Product design, appeareance, functionality, features and specifications are subject to change without notice.
Specialty Coating Systems Inc.
Spin Coating Equipment
Spin Coating System
RotaLab
Contact Us
+90 (212) 696 0406 | info@rotalab.com